Scanning Auger Nanoprobe (SAN)


  • Auger Electron Spectroscopy is the most widely used technique for surface analysis of conductive samples. Provides elemental information about the first ten atomic layers of the sample
  • Unique capability of high resolution SEM imaging combined with Auger elemental analysis and mapping in the nanometer range. Elemental depth profiles are a distinct advantage of the system
  • Applications: thin film and interfacial composition, failure analysis, information on the bonding state of metals and alloys, analysis of interface boundaries (alloys and coatings), materials for reducing friction, lateral composition uniformity in thin films